Process for cementing semiconductor discs onto a carrier plate

Details Process for cementing semiconductor discs onto a carrier plate Process for cementing semiconductor discs onto a carrier plate

1979-09-07

1981-08-11

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156286, 156344, 156345, 156382, 156636, B32B 3122

Patent

active

042832420

ABSTRACT:
An apparatus and process for cementing semiconductor discs onto a carrier ate, wherein after the carrier plate is coated with a layer of adhesive substance, the discs are applied to the adhesive layer and a vacuum-tight sealing dome is placed over the carrier plate to define a sealed, hollow space. A chemically-inert elastic diaphragm is clamped within the dome 0.2 to 1.5 mm above the free surface of the discs, to divide the hollow space into two sections or subchambers which are initially simulataneously evacuated. Then, air pressure is applied to the upper section, so that the discs are pressed by the diaphragm onto the cement layer. Air pressure is then subsequently fed to the lower hollow space, so that the dome can be removed from the carrier plate.

REFERENCES:
patent: 3322598 (1967-05-01), Marks et al.
patent: 3405019 (1968-10-01), Seil et al.
patent: 3453166 (1969-07-01), Herriott et al.
patent: 3475867 (1969-11-01), Walsh
patent: 3493451 (1970-02-01), Beery
patent: 3554834 (1971-01-01), Bennett et al.
patent: 3681171 (1972-08-01), Hojo et al.
patent: 4104099 (1978-08-01), Scherrer

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