Coating apparatus – With vacuum or fluid pressure chamber
Patent
1995-12-04
1999-09-28
Housel, James C.
Coating apparatus
With vacuum or fluid pressure chamber
118719, 118729, 20429823, 20429825, 20429826, 2041921, 20419235, 156345, C23C 1600, C23C 1400, C23F 102
Patent
active
059581344
ABSTRACT:
Method and apparatus for forming the longitudinal edges of stacks of razor blades by conveying the stacks of razor blades along a conveying path in a vacuum chamber past material deposition and material etching stations. The material etching stations are mounted in the sides of the vacuum chamber to be directed generally toward the edge sides of the edges of the razor blades. In another embodiment, stacks of razor blades are mounted on opposite sides of a rotating pallet and material deposition and etching stations are mounted in both side walls of the vacuum chamber. A DC or RF bias is applied to the stacks of razor blades by capacitively coupling the RF bias or conducting by electrical contacts a DC or RF bias to a central portion of the rotating pallet.
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Gupta Subhadra
Krishnaswamy Rajendrapura Seetharamaiya
Reiss Ira
Wagner Israel
Yasar Tugrul
Housel James C.
Ryan V.
Tokyo Electron Limited
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