Process depending on plasma discharges sustained by...

Details Process depending on plasma discharges sustained by... Process depending on plasma discharges sustained by...

2005-02-22

2005-02-22

Alejandro-Mulero, Luz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With radio frequency antenna or inductive coil gas...

C118S7230IR, C216S068000, C438S714000, C427S569000

Reexamination Certificate

active

06858112

ABSTRACT:
A process for fabricating a product 28, 119. The process comprises the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a gaseous discharge excited by a high frequency field in which the vector sum of currents to phase and inverse-phase capacitive coupled voltages from the inductive coupling structure can be selectively maintained.

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