Process controller for semiconductor manufacturing

Details Process controller for semiconductor manufacturing Process controller for semiconductor manufacturing

2006-11-07

2006-11-07

Assouad, Patrick J. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C438S005000, C700S121000

Reexamination Certificate

active

07133788

ABSTRACT:
The present disclosure relates generally to the field of semiconductor manufacturing. In one example, in a production flow of low-volume, high-precision semiconductor products, a method for controlling critical dimensions of a semiconductor product during a semiconductor processing operation in the production flow, the semiconductor processing operation requiring a desired energy value to achieve the critical dimensions includes: measuring a previously formed critical dimension on the product; calculating a first energy value based on the measured critical dimension and a desired critical dimension for the semiconductor processing operation; and obtaining the desired energy value based on the calculated first energy value and a previously-obtained desired energy for the semiconductor processing operation performed on a prior product in the production flow.

REFERENCES:
patent: 6368879 (2002-04-01), Toprac
patent: 6745086 (2004-06-01), Pasadyn et al.
patent: 2005/0197721 (2005-09-01), Chen et al.

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