Process control using physical modules and virtual modules

Details Process control using physical modules and virtual modules Process control using physical modules and virtual modules

2004-08-27

2008-11-11

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S099000

Reexamination Certificate

active

07451011

ABSTRACT:
The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.

REFERENCES:
patent: 5914879 (1999-06-01), Wang et al.
patent: 5980591 (1999-11-01), Akimoto et al.
patent: 6747734 (2004-06-01), Ritzdorf et al.
patent: 7212878 (2007-05-01), Funk et al.
patent: 2004/0200574 (2004-10-01), Davis et al.
patent: WO 2004/019147 (2004-03-01), None
Yong-Ho Shin, Tae-Eong Lee, Ja-Hee Kim, Hwan-Yong Lee. “Modeling and Implementing a Real-Time Scheduler for Dual-Armed Cluster Tools”. Computers in Industry 45 (2001): 13-27.

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