Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1992-08-31
1994-11-01
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356355, 356384, G01B 902
Patent
active
053611373
ABSTRACT:
A method and apparatus for measuring submicron linewidths, using diffraction gratings. A set of "fixed-linewidth variable-pitchwidth" test gratings has a number of gratings, each grating having the same linewidth but having different pitchwidths. These gratings are illuminated to form diffraction patterns. A set of peak intensities of the first or second order diffraction image from each grating is recorded. Either of these intensity values forms a curve around an extrema, which represents the intensity from a grating whose pitchwidth is equal to one-half the linewidth.
REFERENCES:
patent: 4050821 (1977-09-01), Cuthbert et al.
patent: 4330213 (1982-05-01), Kleinknecht et al.
patent: 4408884 (1983-10-01), Kleinknecht et al.
"Continuous Optical Measurement of the Dry Etching of Silicon Using the Diffraction of a Lamellar Grating", Geraldo F. Mendes, Lucila Cescato, Jaime Frejlich, Edmundo S. Braga, and Alaide P. Mammmana, J. Electrochem Soc.: Solid-State Science and Technology, Jan. 1985, pp. 190-193.
"In Situ Wafter Monitoring for Plasma Etching", Dennis S. Grimard, Fred L. Jerry Jr., and Michael E. Elta, University of Michigan, Department of Electrical Engineering and Computer Science, 1301 Beal Avenue, Ann Arbor, Mich. 48109-2122.
"Optical Monitoring of the Etching of SiO.sub.2 and Si.sub.8 N.sub.4 on Si by the Use of Grating Test Patterns", H. P. Kleinknecht and H. Meier, J. Electrochem Soc.: Solid-State Science and Technology, May 1978, pp. 798-803.
"A Simple Technique for Linewidth Measurement of Gratings on Photomasks", S. Sohail H. Naqvi, Susan Gaspar, Kirt Hickman, and John R. McNeil, Center for High Technology Materials, University of New Mexico, Albuquerque, N. Mex. 87131.
"In Situ Monitoring of Sub-micron Linewidths using a Diffraction Grating Test Pattern", Phillip Chapados, Ajit Paranjpe, Jimmy Hosch, and Cecil Davis, Texas Instruments Inc.
Aton Thomas J.
Chapados, Jr. Phillip
Hosch Jimmy W.
Paranjpe Ajit P.
Crane John C.
Donaldson Richard L.
Keesee LaCharles
Texas Instruments Incorporated
Turner Samuel A.
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