4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Jimmy W. Hosch

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Diffraction gratings for submicron linewidth measurement

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Process control for submicron linewidth measurement

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
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System and method for determining endpoint in etch processes...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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