Process control based on an estimated process result

Details Process control based on an estimated process result Process control based on an estimated process result

2005-08-02

2005-08-02

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S014000, C700S031000, C700S044000, C700S057000, C702S174000, C716S030000

Reexamination Certificate

active

06925347

ABSTRACT:
A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.

REFERENCES:
patent: 5526293 (1996-06-01), Mozumder et al.
patent: 6532428 (2003-03-01), Toprac
patent: 6556884 (2003-04-01), Miller et al.
patent: 6560503 (2003-05-01), Toprac et al.
patent: 6597447 (2003-07-01), Stirton et al.
patent: 6610550 (2003-08-01), Pasadyn et al.
patent: 6630362 (2003-10-01), Lensing
patent: 2002/0095278 (2002-07-01), Riley et al.
patent: 2002/0192966 (2002-12-01), Shanmugasundram et al.

Affiliated with

Also associated with

Rating

Process control based on an estimated process result does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process control based on an estimated process result, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process control based on an estimated process result will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3466209