Process control at an interconnect level

Details Process control at an interconnect level Process control at an interconnect level

2005-01-11

2005-01-11

Von Buhr, Maria N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S005000

Reexamination Certificate

active

06842661

ABSTRACT:
A method and an apparatus for performing process control at an interconnect level. A process step upon a workpiece is performed. Manufacturing data relating to an interconnect location on the workpiece is acquired. An interconnect characteristic control process is performed based upon the manufacturing data. The interconnect characteristic control process includes controlling a process relating to a structure associated with the interconnect location on the workpiece to control a characteristic relating to the interconnect location.

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