Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2008-12-15
2010-12-28
Lebentritt, Michael S (Department: 2829)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S014000, C324S701000
Reexamination Certificate
active
07858405
ABSTRACT:
A process condition evaluation method for a liquid crystal display module (LCM) includes: a first step of obtaining a threshold power measuring pattern, an analysis sample for a cell bonding status in an LCD fabrication process, and obtaining a lower substrate sample by separating an upper substrate from the threshold power measuring pattern; a second step of supplying voltages on a gate pad on the lower substrate sample with sequentially increasing a voltage level by a predetermined unit by using an electrical device, and obtaining a threshold current and a threshold voltage by measuring currents at a drain pad whenever voltage increased by a predetermined unit is applied to the gate pad; and a third step of obtaining threshold power based on the threshold current and the threshold voltage, and thereby evaluating process conditions of the LCM.
REFERENCES:
patent: 5594463 (1997-01-01), Sakamoto
patent: 2002/0101395 (2002-08-01), Inukai
patent: 2005/0225515 (2005-10-01), Tsuchida et al.
patent: 2006/0038758 (2006-02-01), Routley et al.
Choi Hoon
Choi Young Seok
Lee Jeong-Yeop
Oh Kwang-Sik
Kusumakar Karen M
Lebentritt Michael S
LG Display Co. Ltd.
McKenna Long & Aldridge LLP
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