Process chamber exhaust system

Details Process chamber exhaust system Process chamber exhaust system

1996-11-18

2000-06-20

Brahan, Thomas J.

Ventilation

Workstation ventilator

B05G 1500

Patent

active

060771577

ABSTRACT:
A method and apparatus for exhausting gases out of multiple processing regions is provided and generally comprises first and second pumping channels disposed in first and second processing regions and connected to a pump via a common exhaust port.

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