Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2005-01-11
2008-12-09
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07463351
ABSTRACT:
An optical system for detecting defects on a wafer that includes a device for producing a beam and directing the beam onto the wafer surface, producing an illuminated spot on the wafer's surface. The system further includes a detector detecting light, and a mirrored assembly having together with the detector an axis of symmetry about a line perpendicular to the wafer surface. The assembly is configured to receive scattered light from the surface, where the scattered light including a first scattered light part being scattered from the pattern. The assembly is further configured to reflect and focus rotationally symmetrically about the axis of symmetry the scattered light to the detector. The system further includes a device operating with the detector for facilitating detection of a scattered light other than the specified scattered light due to pattern.
REFERENCES:
patent: 4598997 (1986-07-01), Steigmeier et al.
patent: 4957367 (1990-09-01), Dulman
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5177559 (1993-01-01), Batchelder et al.
patent: 5572598 (1996-11-01), Wihl et al.
patent: 5659390 (1997-08-01), Danko
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6366352 (2002-04-01), Goldberg et al.
patent: 6538730 (2003-03-01), Vaez-Iravani et al.
patent: 6556290 (2003-04-01), Maeda et al.
patent: 7002677 (2006-02-01), Bevis et al.
patent: 7088443 (2006-08-01), Vaez-Iravani et al.
patent: 41 34 747 (1993-04-01), None
patent: 2185101 (1987-07-01), None
patent: 99/14575 (1999-03-01), None
patent: 99/56113 (1999-11-01), None
patent: 01/98755 (2001-12-01), None
Applied Materials, Inc., PCT/US03/22786, International Search Report, mailed Oct. 12, 2003, 8pp.
Almogy Gilad
Guetta Avishay
Naftali Ron
Shoham Doron
Applied Materials Inc.
Fahmi Tarek N.
Pham Hoa Q
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