Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1986-01-16
1991-02-05
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20429806, 20429816, C23C 1434
Patent
active
RE0335304
ABSTRACT:
The invention concerns a method of coating shaped parts having a three-dimensional coating surface by the cathodic atomization of target material of a first cathode arrangement. The cathode arrangement comprises a magnetic field generator for the concentration of a first discharge space (plasma cloud) in the zone of the target surface by means of a first magnetic field (plasma trap), which is spatially closed with respect to the target. According to the invention and for the purpose of producing a uniform coating even on parts of complicated shape, it is proposed that, on their side disposed opposite the first cathode arrangement, the shaped parts should be simultaneously subjected to the atomizing action of a second cathode arrangement with the same target material. The second cathode arrangement likewise comprises a magnetic field generator for concentrating a second discharge space in the zone of the target surface by means of a second magnetic field, spatially closed with respect to the target; the second cathode arrangement is so arranged in relation to the first that the two cathode arrangements between them form a gap in which discharge occurs and through which the shaped parts are moved. Furthermore, a voltage U.sub.Sub, which is negative with respect to ground and is of such magnitude that the discharge spaces of the two cathode arrangements reach and touch the shaped part, is applied to said part.
The invention also covers apparatus for performing the method of the invention.
REFERENCES:
patent: 4308126 (1981-12-01), Wright
patent: 4354910 (1982-10-01), Rordorf
patent: 4426267 (1984-01-01), Munz
patent: 4544468 (1985-10-01), Munz et al.
Maniv et al., J. Vac. Sci. Technol., 17 (1980), pp. 743-751.
Hessberger Gerhard
Munz Wolf-Dieter
Leybold Aktiengesellschaft
Nguyen Nam X.
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