Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1988-08-09
1989-11-21
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
204298, C23C 1434
Patent
active
048820229
ABSTRACT:
A process using a multiple-substance alloy having a gold content most preferably in the range of 94 to 98 percent by weight as a target in a cathode sputtering apparatus is disclosed. The alloy further contains non-gold elements of aluminum, copper and preferably an element of the group of Co, Ni, G, Ti, In, Cd, Sn, Fe and Pd.
REFERENCES:
patent: 1577431 (1925-10-01), Davignon
patent: 3616406 (1969-11-01), Turner
patent: 3702290 (1972-11-01), Yu et al.
patent: 4619865 (1986-10-01), Keem et al.
Dietrich Horst
Hoffman Dieter
Munz Wolf-Dieter
Siewert G. A. Horst
Demetron Gesellschaft Fuer Elektronik-Werkstoffe mbH
Leybold Aktiengesellschaft
Nguyen Nam X.
LandOfFree
Process and apparatus for sputter coating a gold alloy onto a su does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process and apparatus for sputter coating a gold alloy onto a su, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process and apparatus for sputter coating a gold alloy onto a su will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1424240