Process and apparatus for modifying a surface in a work region

Details Process and apparatus for modifying a surface in a work region Process and apparatus for modifying a surface in a work region

2007-08-28

2007-08-28

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S492100, C250S492200, C250S492300, C700S121000, C073S105000

Reexamination Certificate

active

11452891

ABSTRACT:
An apparatus and process for manufacturing changes of a substrate in a work region which is 100×100×100 microns or smaller is described. The apparatus uses a plasma source adjacent to the work region to produce radiation or matter which changes the surface. An atomic force microscope or laser can be used in addition. The process and apparatus can be used to produce MEMS devices on a substrate for use in a wide variety of applications.

REFERENCES:
patent: 2006/0275710 (2006-12-01), Yamazaki et al.

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