Metal fusion bonding – Process – Preplacing solid filler
Patent
1997-04-28
1999-01-12
Heinrich, Samuel M.
Metal fusion bonding
Process
Preplacing solid filler
221200, 156267, 438613, 228 41, H01L 2160, B23K 106
Patent
active
058576100
ABSTRACT:
A process of forming ball bumps for electrical connection to an integrated circuit, the process comprising the steps of: applying a vibration at a small amplitude to a vessel containing small balls of an electroconductive material to cause the small balls to jump up above the vessel; holding and arranging the small balls on an arrangement baseplate by attracting the jumping up small balls to attraction openings provided in the arrangement baseplate in positions corresponding to positions of at least one set of the electrode pads of one semiconductor chip; removing excess small balls adhered either to the arrangement baseplate or to the small balls attracted to the openings; and simultaneously bonding the small balls held and arranged on the arrangement baseplate to bonding spots arranged in positions corresponding to said positions of said at least one set of the electrode pads.
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patent: 4346516 (1982-08-01), Yokouchi et al.
patent: 4462534 (1984-07-01), Bitaillou et al.
patent: 4871110 (1989-10-01), Fukasawa et al.
patent: 5431332 (1995-07-01), Kirby et al.
Hoshiba Hiroshi
Kawakami Yoji
Konda Masashi
Tatsumi Kohei
Heinrich Samuel M.
Nippon Steel Corporation
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