Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1987-12-23
1990-03-13
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250560, 356369, 356381, G01B 1106
Patent
active
049085085
ABSTRACT:
A process for determining the thickness and/or change in thickness of a thin layer applied to a carrier, the process comprising radiating the carrier coated with the thin layer with a plane polarized light beam at a single incident angle and detecting the reflectance on the carrier and layer. The light reflected by the carrier and the thin layer is split into a p-polarized part and an s-polarized part, after which the respective intensities (I.sub.s).sub.r and (I.sub.p).sub.r l of the reflected s-polarized light and p-polarized light are measured simultaneously for the two parts, and calculating a quantity M according to the equation: ##EQU1## in which formula R.sub.s is the ratio of the intensities (I.sub.s).sub.r and (I.sub.s).sub.i of the reflected and incident s-polarized light, respectively;
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Akzo N.V.
Westin Edward P.
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