Process and apparatus for controlling metal thickness, and depos

Details Process and apparatus for controlling metal thickness, and depos Process and apparatus for controlling metal thickness, and depos

1976-12-08

1979-02-27

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Including a radioactive source

250358R, 427 9, G21K 700, G01N 2300

Patent

active

041420993

ABSTRACT:
Metal layer thicknesses on articles during formation or degradation, as in electroless or electrolytic deposition or chemical etching, are measured and controlled by a process comprising determining the radiation scattering capacity of a corresponding metallic layer deposited on or removed from a test sample while the test sample is present in a bath solution during formation or degradation of the metal layer. Also provided is a novel immersible sensor for measuring the rate and thickness of metal layers being deposited or degraded.

REFERENCES:
patent: 3019336 (1962-01-01), Johns
patent: 3147169 (1964-09-01), Albertson
patent: 3475242 (1969-10-01), Radimer
patent: 3503817 (1970-03-01), Radimer
patent: 3719565 (1973-03-01), Herrmann
IBM Technical Disclosure Bulletin, vol. 17, No. 6, Nov. 1974.

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