Process and apparatus for applying optical coatings

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

Reexamination Certificate

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C204S192120, C204S192150, C204S192160, C204S192230

Reexamination Certificate

active

07820018

ABSTRACT:
A process and apparatus for applying an optical coating to a substrate, wherein a transition layer12, which is used to match mechanical properties of a substrate10to mechanical properties of a layer system16to be applied upon the transition layer12, is deposited on a front surface20of the substrate10. For this purpose, during a sputtering process carried out in a vacuum chamber18, reaction products14are incorporated at least virtually exclusively in the transition layer12on the substrate. This prevents other surfaces of the vacuum chamber18and the rear side34of the substrate10from being contaminated with the reaction products14and/or their precursors.

REFERENCES:
patent: 3537973 (1970-11-01), Laib
patent: 4737379 (1988-04-01), Hudgens et al.
patent: 6277507 (2001-08-01), Anzaki et al.
patent: 2005/0040034 (2005-02-01), Landgraf et al.
patent: 1 092 787 (2001-04-01), None
patent: 2001073130 (2001-03-01), None
patent: WO 03/048406 (2003-06-01), None
Deposition of Gold-Containing Siloxane Thin Films, F. Fracassi et al., Elsevier Science S.A., 1996, pp. 60-63.

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