Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Halogenous component
Reexamination Certificate
2006-06-13
2006-06-13
Johnson, Edward M. (Department: 1754)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
Halogenous component
Reexamination Certificate
active
07060234
ABSTRACT:
Method and apparatus for abating F2from byproducts generated during cleaning of a processing chamber. F2abatement is efficiently performed by directly injecting H2in line with a foreline exiting the processing chamber. A tube which is highly resistant to oxidation and corrosive gases, even at high temperature, is connected in line with the foreline as part of the exhaust line of the processing chamber. A cooling jacket may be provided for cooling the tube, since the reaction between F2and H2is exothermic. A pressure monitoring arrangement may also be employed to insure that pressure within a hydrogen line, that feeds the injection of H2into the tube, does not exceed a predetermined pressure value.
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ICONEL® 601, http/www.c276.com/DataSheets/601.htm, Oct. 2, 2000.
Le Phong
Nemani Srinivas D.
Pokharna Himanshu
Applied Materials
Townsend & Townsend & Crew LLP
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