Procedure for fabrication of microstructures over large areas us

Details Procedure for fabrication of microstructures over large areas us Procedure for fabrication of microstructures over large areas us

1984-02-06

1985-04-23

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156643, 156646, 1566591, 156657, 156660, 156667, 204192E, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

045128480

ABSTRACT:
The present invention is an improved replication process which copies a master pattern onto an intermediate transfer mask which is then used to form a lithographic mask on the surface of a substrate. A pattern derived from the original master pattern is then produced in the substrate by an etching process.

REFERENCES:
patent: 3052581 (1962-09-01), Gutknecht
patent: 3290191 (1966-12-01), Davis

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