Probe with torsion lever structure, and scanning probe microscop

Details Probe with torsion lever structure, and scanning probe microscop Probe with torsion lever structure, and scanning probe microscop

1995-09-20

1996-11-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

369126, H01J 3726

Patent

active

055742793

ABSTRACT:
A probe of torsion lever structure is provided with a flat-plate driving unit formed on a substrate with a gap therebetween, two beams positioned along a straight line parallel to the substrate and rotatably supporting the flat plate-shaped driving unit relative to the substrate, a drive device for driving the flat plate-shaped driving unit, and a tip for information input/output provided at an end of the flat plate-shaped driving unit. The two beams are provided at a position between the end of the flat plate-shaped driving unit and the other end thereof, closer to the other end than the center between the end and the other end of the flat plate-shaped driving unit.

REFERENCES:
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 5283437 (1994-02-01), Greschner et al.
patent: 5317152 (1994-05-01), Takamatsu et al.
patent: 5357108 (1994-10-01), Suzuki et al.
"Surface Studies by Scanning Tunneling Microscopy" by G. Binning et al. The American Physical Society, vol. 49. No. 1 Jul. 5, 1982; p. 57.
"Topography and local modification of the HoBa.sub.2 Cu.sub.3 O.sub.7--x (001) surface using scanning tunneling microscopy" by H. Heinzelmann et al.; Applied Physics Letters; vol. 53; Dec. 12, 1988, No. 24; pp. 2447-2449.
"Nanometer scale structure fabrication with the scanning tunneling microscope" by U. Staufer; Applied Physics Ltrs, vol. 51, Jul. 27, 1987 No. 4 pp. 244-246.

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