Probe unit for an atomic probe microscope

Details Probe unit for an atomic probe microscope Probe unit for an atomic probe microscope

1990-02-05

1991-08-20

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 96, 324158R, 324158D, 250306, G01R 3100, H01J 3700

Patent

active

050417835

ABSTRACT:
A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.

REFERENCES:
patent: 4343993 (1982-08-01), Binning et al.
patent: 4709141 (1987-11-01), Olsen
patent: 4851767 (1989-07-01), Halbout et al.
patent: 4857836 (1989-08-01), Soelkner
patent: 4891584 (1990-01-01), Kamieniecki et al.
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4928058 (1990-05-01), Williamson

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