Probe unit, driving method thereof, and scanning device for dete

Details Probe unit, driving method thereof, and scanning device for dete Probe unit, driving method thereof, and scanning device for dete

1990-06-28

1991-03-05

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 369101, 369126, 346158, H01J 3726

Patent

active

049980165

ABSTRACT:
A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.

REFERENCES:
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4894538 (1990-01-01), Iwatsuki et al.

Affiliated with

Also associated with

Rating

Probe unit, driving method thereof, and scanning device for dete does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe unit, driving method thereof, and scanning device for dete, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe unit, driving method thereof, and scanning device for dete will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-498625