Probe unit and its manufacturing method

Details Probe unit and its manufacturing method Probe unit and its manufacturing method

2006-12-05

2006-12-05

Crane, Sara (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C438S014000, C324S765010, C324S754090

Reexamination Certificate

active

07145171

ABSTRACT:
A probe unit comprises a flexible substrate made of an inorganic substance and having an almost straight edge, an electro conductive film formed on a surface of the substrate and having a plurality of contact parts aligned on a surface of the edge and can contact with electrodes of a sample and lead parts connected to the contact parts, wherein the substrate is elastically deformed together with the contact part while the plurality of the contacts parts are supported by the edge when a force is added to press a surface of the contact part.

REFERENCES:
patent: 4321122 (1982-03-01), Whitcomb et al.
patent: 5723347 (1998-03-01), Hirano et al.
patent: 6211691 (2001-04-01), Okuno
patent: 07-211752 (1995-08-01), None
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patent: 2001-116766 (2001-04-01), None
patent: 2001-194386 (2001-07-01), None
patent: 2001-337111 (2001-12-01), None
patent: 2001-343399 (2001-12-01), None
patent: 2002-286755 (2002-10-01), None
patent: 2000-0047410 (2001-07-01), None
Copy of Korean Office Action dated Aug. 23, 2004 (and English translation of same).

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