Radiant energy – Inspection of solids or liquids by charged particles
Patent
1996-09-13
1999-06-15
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
25044211, H01J 3720
Patent
active
059124610
ABSTRACT:
A cantilever is attached to a moving block by means of a holder. Three sapphire plates are provided at a corner of the moving block so that their respective planes extend at right angles to one another. Three piezo-actuators are displaceable in directions intersecting at right angles to one another, and fixed with their one ends to stationary tables, respectively. Sapphire plates are attached individually to the respective other ends of the piezo-actuators. Each sapphire plate faces its corresponding sapphire plate on the moving block with ruby spheres between them. Two attracting magnets are attached individually to the respective sapphire plates at the center. The magnets face each other with a narrow enough space of, e.g., several micrometers between them.
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Ando Toshio
Hayashi Yoshiaki
Anderson Bruce
Olympus Optical Co,. Ltd.
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