Probe scanning mechanism for a scanning probe microscope

Details Probe scanning mechanism for a scanning probe microscope Probe scanning mechanism for a scanning probe microscope

1999-04-06

2000-09-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, G01N 1312

Patent

active

061181218

ABSTRACT:
A cantilever is attached to a moving block by means of a holder. Three sapphire plates are provided at a corner of the moving block so that their respective planes extend at right angles to one another. Three piezo-actuators are displaceable in directions intersecting at right angles to one another, and fixed with their one ends to stationary tables, respectively. Sapphire plates are attached individually to the respective other ends of the piezo-actuators. Each sapphire plate faces its corresponding sapphire plate on the moving block with ruby spheres between them. Two attracting magnets are attached individually to the respective sapphire plates at the center. The magnets face each other with a narrow enough space of, e.g., several micrometers between them.

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