Radiant energy – Inspection of solids or liquids by charged particles
Patent
1997-11-12
1999-10-12
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
250423F, H01J 3700
Patent
active
059658851
ABSTRACT:
A spring is connected to an edge section of a sample side of a spindle receiving a force in the Z-axial direction by a first poise coil motor, and a probe is attached to the tip of the spring. The spindle is supported by an internal tube with a spring. The movement of the spindle is enlarged by the spring to be conveyed to the probe, whereby displacement of the probe is amplified. For this reason, a resonance frequency f0 of a system comprising the movable element of the first poise coil motor, spindle, spring, spring and probe can be increased. If the spring is changed to springs in two stages, a resonance frequency f0 of the system can be increased with comparatively compact configuration.
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Journal of Vacuum Science & Technology: Part B, vol. 12, No. 3, May 1, 1994, pp. 1662-1664, J. Tapson et al., "Improved Scanning Tunneling Microscope Feedback Performance By Means of Separate Actuators".
Anderson Bruce
Seiko Instruments Inc.
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