Probe microscope having error correction piezoelectric scanner

Details Probe microscope having error correction piezoelectric scanner Probe microscope having error correction piezoelectric scanner

1994-10-18

1995-09-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3726

Patent

active

054536162

ABSTRACT:
By indirectly measuring the movement of a first scanner comprising a piezoelectric element which moves a specimen or a detecting part by providing a second scanner separate from the first scanner and disposing a displacement detecting sensor in the vicinity of the second scanner and causing the second scanner to move in a similar way as the first scanner, the error between the results after image processing and the actual shape, coming from the non-linearity between the impressed voltage and the amount of displacement of the piezoelectric element, is reduced.

REFERENCES:
patent: 5260926 (1993-11-01), Kuroda et al.
patent: 5308974 (1994-05-01), Elings et al.
patent: 5349735 (1994-09-01), Kawase et al.

Affiliated with

Also associated with

Rating

Probe microscope having error correction piezoelectric scanner does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probe microscope having error correction piezoelectric scanner, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe microscope having error correction piezoelectric scanner will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1553378