Probe manufacturing method, probe, and scanning probe...

Details Probe manufacturing method, probe, and scanning probe... Probe manufacturing method, probe, and scanning probe...

2008-06-17

2008-06-17

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S492300

Reexamination Certificate

active

07388199

ABSTRACT:
A probe is made by attaching a carbon nanotube12to a mounting base end13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film14formed by an electron microscope is stripped off at a stage before bonding by the coating film.

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