Probe holder and probe mounting method for a scanning probe micr

Details Probe holder and probe mounting method for a scanning probe micr Probe holder and probe mounting method for a scanning probe micr

1995-03-17

1996-10-29

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 3728, H01J 3720

Patent

active

055699189

ABSTRACT:
A probe holder non-rotatingly mountable in a support bracket releasibly receives a scanning microscope probe. Guide rods extend outward from the probe holder on the scan head and engage bores formed in the other of the probe holder and the scan head during closure of the scan head with the probe holder to co-axially align the probe with a probe receiver in the scan head. Transversely extending arms on a spindle attached to a scan head slide along ramp surfaces in the scan head to a fixed stop to rotationally position the scan head. Complementary surfaces on the spindle and a stationarily affixed sleeve co-axially center the scan head with the scan head support structure and the probe holder. A method of co-axially and rotationally aligning a probe for exchange between a scan head and a probe holder is disclosed using the guide rods and guide bores, the spindle arms, ramp and stop surfaces and the complementary surfaces on the spindle and the stationary sleeve, and a non-rotatable probe holder mount. The alignment structure and method are also applied to a sample holder.

REFERENCES:
patent: 4785177 (1988-11-01), Besocke
patent: 4871938 (1989-10-01), Elings et al.
patent: 4947042 (1990-08-01), Nishioka et al.
patent: 4992660 (1991-02-01), Kobayashi
patent: 5157256 (1992-10-01), Aaron
patent: 5325010 (1994-06-01), Besocke et al.

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