Probe formed of mono-crystalline SI, the manufacturing method th

Details Probe formed of mono-crystalline SI, the manufacturing method th Probe formed of mono-crystalline SI, the manufacturing method th

1998-03-04

2000-01-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, 216 11, G01B 528, G01C 700, H01J 3726, H01L 21306

Patent

active

060112611

ABSTRACT:
A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of one-end-supported beam which is bowed and formed upon the lever member. The probe is manufactured by forming a film of a material with low density and high elasticity on the silicon layer of an SOI substrate, then oxidizing part of the silicon layer and removing the oxidized portion to form a tip with the material as a so-called bird's beak, and finally the SOI substrate is worked to form the cantilever shape of the lever member. The probe can be used for an information recording/reproducing device with good traceability even in high speed scanning over a recording medium.

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O. Wolter, et al., "Micromachined Silicon Sensors for Scanning Force Microscopy", American Vacuum Society, 1991, pp. 1353-1357.

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