Probe for scanning probe lithography and making method thereof

Details Probe for scanning probe lithography and making method thereof Probe for scanning probe lithography and making method thereof

2006-10-03

2006-10-03

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S492200

Reexamination Certificate

active

07115863

ABSTRACT:
A probe of scanning probe lithography which provides a long time of useful life. The probe has a tip part comprising a conductor and an insulator, the insulator is formed to cover the conductor, and the conductor is formed to provide a substantially uniform cross-sectional configuration with respect to a surface to be patterned through scanning.

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