Probe for scanning over a substrate and a data storage device

Details Probe for scanning over a substrate and a data storage device Probe for scanning over a substrate and a data storage device

2006-01-13

2008-10-21

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07437915

ABSTRACT:
A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning over a storage medium. The probe comprises a spring cantilever being during operation of the probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex and an actuator for lateral positioning of the tip.

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Vettiger, V. et al. “The ‘Millipede’—More than one thousand tips for future AFM data storage” IBM J. Res. Develop. vol. 44, No. 3, May 2000, pp. 323-340.

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