Probe for atomic force microscope and atomic force microscope

Details Probe for atomic force microscope and atomic force microscope Probe for atomic force microscope and atomic force microscope

1997-03-06

1999-03-02

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 734

Patent

active

058774122

ABSTRACT:
A probe for an atomic force microscope comprises a body having a cantilever portion and a probe portion made from a single-crystal material. The probe portion has a tip formed as a vertex of three planes including at least two crystal planes.

REFERENCES:
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5264696 (1993-11-01), Toda
Applied Physics Letters, vol. 66, No. 24, Jun. 12, 1995, pp. 3245-3247, Hiroshi Muramatsu et al., "Near-Field Optical Microscopy in Liquids".
Applied Physics Letters, vol. 66, No. 14, Apr. 3, 1995, pp. 1842-1844, Khaled Karrai et al., "Piezoelectric Tip-Sample Distance Control for Near Field Optical Microscopes".
Applied Physics Letters, vol. 54, No. 13, Mar. 27,1989, pp. 1223-1225, D.K. Biegelsen et al., "Simple Ion Milling Preparation of <111> Tungsten Tip".
Review of Scientific Instruments, vol. 61, No. 10, part I, Oct., 1990, pp. 2538-2541, H. Lemke et al., "Improved Microtips for Scanning Probe Microscopy".

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