Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-09-28
1994-08-02
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
053348354
ABSTRACT:
A probe drive mechanism includes a cantilever portion in which a piezoelectric layer is disposed between electrode layers, and a circuit portion which is positioned adjacent to the cantilever portion and drives the cantilever. The cantilever portion and the circuit portion are formed on the same substrate. A protection layer covers the circuit portion and part of the substrate, and the cantilever portion is formed on the protection layer adjacent to the circuit portion.
REFERENCES:
patent: 4237379 (1980-12-01), Deckert et al.
patent: 4638206 (1987-01-01), Tsunooka et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
G. Binning, et al., "Surface Studies by Scanning Tunneling Microscopy", Physical Review Letters, The American Physical Society, vol. 49, No. 1, pp. 57-60 (Jul. 5, 1982).
Shinya Akamine, et al., "Microfabricated Scanning Tunneling Microscope", IEEE Electron Device Letters, vol. 10, No. 11, pp. 490-492 (Nov. 10, 1989).
Transducers '89, The 5th International Conference on Solid-State Sensors and Actuators & Eurosensors III, Abstracts, Conference Organizers in Medicine, Science and Technology, Lecture No. D3.6, p. 271 (Jun. 25-30, 1989).
Kawasaki Takehiko
Nakayama Masaru
Shimada Yasuhiro
Suzuki Yoshio
Takamatsu Osamu
Anderson Bruce C.
Canon Kabushiki Kaisha
LandOfFree
Probe drive mechanism and electronic device which uses the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Probe drive mechanism and electronic device which uses the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probe drive mechanism and electronic device which uses the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-66587