Probe device for memory device having multiple cantilever probes

Static information storage and retrieval – Systems using particular element – Electrical contacts

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365151, 365174, G11C 1150

Patent

active

058869220

ABSTRACT:
A memory device that comprises a planar memory medium and a probe device mounted opposite the planar memory medium. The probe device includes a substrate having a substrate surface and probe cells arrayed on the substrate surface. Each of the probe cells comprises a probe, an auxiliary electrode and a probe driving circuit. The probe is formed in the substrate, includes part of the substrate surface, and additionally includes a conductive needle projecting towards the memory medium. The conductive needle includes a needle tip adjacent the memory medium. The auxiliary electrode is mounted on the probe, and is located between the probe and the memory medium. The auxiliary electrode is disposed substantially parallel to, and spaced from, the substrate surface. The driving circuit is formed in the substrate and projects from the substrate surface towards the memory medium. The probe driving circuit has outputs electrically connected to the auxiliary electrode and the memory medium.

REFERENCES:
patent: 4945515 (1990-07-01), Ooumi et al.
patent: 5216631 (1993-06-01), Sliwa et al.
patent: 5276672 (1994-01-01), Miyazaki et al.

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