Probe device

Details Probe device Probe device

2007-07-31

2007-07-31

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C073S104000, C073S105000

Reexamination Certificate

active

11065273

ABSTRACT:
A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.

REFERENCES:
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5804709 (1998-09-01), Bourgoin et al.
patent: 5883705 (1999-03-01), Minne et al.
patent: 6006594 (1999-12-01), Karrai et al.
patent: 6504365 (2003-01-01), Kitamura
patent: 6515274 (2003-02-01), Moskovits et al.
patent: 6583412 (2003-06-01), Williams
patent: 6740518 (2004-05-01), Duong et al.
patent: 6798222 (2004-09-01), Tanaka et al.
patent: 6823724 (2004-11-01), Kobayashi et al.
patent: 6873163 (2005-03-01), Bonnell et al.
patent: 6942771 (2005-09-01), Kayyem
patent: 7014795 (2006-03-01), Grigorov et al.
patent: 7045285 (2006-05-01), Kayyem et al.
patent: 7088120 (2006-08-01), Matsumoto et al.
patent: 2002/0005481 (2002-01-01), Williams
patent: 2002/0092340 (2002-07-01), Prater et al.
patent: 2003/0160623 (2003-08-01), Tanaka et al.
patent: 2004/0051542 (2004-03-01), Miles et al.
patent: 2005/0009197 (2005-01-01), Adams et al.
patent: 2005/0121615 (2005-06-01), Prater et al.
patent: 2005/0139770 (2005-06-01), Matsumoto et al.
patent: 2006/0160136 (2006-07-01), Xiang et al.
Kawai Lab “(II) Nano-bio-science & Molecular devices”, Jul. 17, 2004, <http://www.kawai.sanken.osaka-u.ac.jp/research—nanobio—en.html>.
G. Coutourier et al., “A virtual non contact-atomic force mircoscope (NC-AFM): Simulation and comparison with analyticmodels”, <http://www.edpsciences.org/articles/epjap/pdf/2001/08/ap01031.pdf>.
Elizabeth A.Boer et al., “Models for quantitative charge imaging by atomic force micrsocopy”, J. Appl.Phys.90 (6) 2001,pp. 2764-2772.
A. S. Foster et al., “Stimulating atomic force microscopy imaging of the ideal anddefected TiO2 (110) surface”, Phys. Rev. B68, 195410 (2003).
Ryuji Nishi et al., “Non-contact atomic force microscopy study of atomic manipulation on an insulator surface by nanoindentation”, Nanotechnology 17 (2006) S142-S147.
Omicron Nanotechnology, Atomic resolved non-contact AFM imaging of Ge/Si(105) surface (Resultofthe month Jul. 2005).
Yasuhisa Naito, et al., “Denka Idoryoku Kenbikyo/Bunko no Kaihatsu”, (Development of Charge Transfer Force Microscopy/Spectroscopy), 2002 Nen (Heisel 14 Nen) Shunki Dai 49 Kai Oyo Butsurigaku Kankel Rengo Koenkal Koen Yokoshu, separate vol. 2, The Japan Society of Applied Physics, Mar. 27, 2002, 27a-P2-9, p. 667.
Yoicho Otsuka, et al., “A Nano Tester: A New Technique for Nanoscale Electrical Characerization by Point-Contact Current-Imaging Atomic Force Microscopy”, Japanese Journal of Applied Physics, Jul. 1, 2002, vol. 41, Part 2, No. 7A, pp. L742-L744.
Masaaki Shimizu, et al., “Studies on Electronic Structures of Semiconductors by Atomic Force Microscopy”, Journal of Chemical Physics, Jun. 22, 1999, vol. 110, No. 24, pp. 12116-12121.
Yasuhisa Naito, et al., “Denka Idoryoku Kenbikyo/Bunko no Kaihatsu”, 2002 Nen (Heisel 14 Nen) Shuki Dai 63 Kai Oyo Butsuri Gakkai Gakujutsu Koenkal Koen Yokoshu, separate vol. 2, The Japan Society of Applied Physics, Sep. 24, 2002, 27a-ZQ-1, p. 580.

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