Probe card transfer assist apparatus, and inspection...

Details Probe card transfer assist apparatus, and inspection... Probe card transfer assist apparatus, and inspection...

2006-09-20

2009-06-02

Nguyen, Vinh P (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

Reexamination Certificate

active

07541801

ABSTRACT:
A probe card transfer assist apparatus for assisting an operation of transferring a probe card used in an electrical inspection apparatus includes a holder for holding the probe card; a support for supporting the holder in a freely-rotate manner about a point; and an elevation unit for moving the support up and down. Further, an inspection equipment includes an electrical inspection apparatus; and a probe card transfer assist apparatus for assisting an operation of transferring a probe card used in the electrical inspection apparatus, the assist apparatus including a holder for holding the probe card; a support for supporting the holder in a freely-rotating manner about a point; and an elevation unit for moving the support up and down.

REFERENCES:
patent: 5444386 (1995-08-01), Mizumura
patent: 5640100 (1997-06-01), Yamagata et al.
patent: 6414478 (2002-07-01), Suzuki
patent: 6838892 (2005-01-01), Suzuki
patent: 63217636 (1988-09-01), None

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