Probe card that controls a temperature of a probe needle,...

Details Probe card that controls a temperature of a probe needle,... Probe card that controls a temperature of a probe needle,...

2006-05-15

2008-11-25

Nguyen, Vinh P (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S762010

Reexamination Certificate

active

07456641

ABSTRACT:
Provided are a probe card, a test apparatus having the probe card, and a test method using the test apparatus. The probe card includes a probe substrate having a signal line, a probe needle connected to the signal line and fixed to the probe substrate, and a cooling unit for cooling the temperature of the probe needle. Therefore, the probe needles contacting each chip can be maintained at a certain low temperature without increasing the temperature. As a result, it is possible to pervent deformation of the probe needles and minimize an amount of impurities stuck to the probe needles.

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patent: 2005067758 (2005-07-01), None

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