Probe card, apparatus and method for inspecting an object

Details Probe card, apparatus and method for inspecting an object Probe card, apparatus and method for inspecting an object

2006-08-28

2009-10-20

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010

Reexamination Certificate

active

07605596

ABSTRACT:
A probe card, an apparatus and a method of inspecting an object. In the example method, a first inspection current may be divided into a plurality of first divided inspection currents. Each of the first divided inspection currents may be supplied to a different one of a plurality of first chips. A second inspection current may be selectively applied to a second chip other than the first plurality of chips. In an example, the second inspection current may be substantially equal to at least one of the plurality of first divided inspection currents. In a further example, the example probe card and/or the apparatus may perform the example method.

REFERENCES:
patent: 7138792 (2006-11-01), Fu et al.
patent: 2003/0234659 (2003-12-01), Zieleman
patent: 2004/0041579 (2004-03-01), Kim et al.
patent: 2005/0007140 (2005-01-01), Kim et al.
patent: 07-169806 (1995-07-01), None
patent: 2005-005343 (2005-01-01), None
patent: 1020010112792 (2001-12-01), None

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