Probe card

Details Probe card Probe card

2006-11-21

2006-11-21

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S761010, C324S762010

Reexamination Certificate

active

07138812

ABSTRACT:
Provided is a probe card including: a printed circuit board comprising a ground electrode; at least one dielectric disposed below the ground electrode; and a plurality of needles, each of which comprises: a first end portion contacting a wafer pad of a semiconductor device, a second end portion electrically connected to the printed circuit board, and the remaining portion excepting the first and second end portions surrounded by the at least one dielectric. A metal plate is disposed below the at least one dielectric; and a connecting pin electrically connects the metal plate to the ground electrode and fixes the at least one dielectric and the metal plate to the printed circuit board.

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