Probe apparatus having reduced misalignment of conductive needle

Details Probe apparatus having reduced misalignment of conductive needle Probe apparatus having reduced misalignment of conductive needle

1995-10-20

1997-02-04

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

369126, H01J 31256, G11B 900

Patent

active

056001371

ABSTRACT:
A probe apparatus includes a probe group supporting member having a substrate on which probes having conductive needles are formed. The main bodies of the probes are constructed from composite beams, e.g. L-shaped beams, formed by joining a plurality of arms, e.g. first and second arms, which extend from the substrate of the probe group supporting member, and which overhang the substrate in a direction parallel to the surface of the substrate. The conductive needles are attached perpendicular to the substrate surface at a selected point on each of the composite beams.

REFERENCES:
patent: 5216631 (1993-06-01), Sliwa, Jr.
patent: 5235187 (1993-08-01), Arney et al.
patent: 5276672 (1994-01-01), Miyazaki et al.
patent: 5375033 (1994-12-01), MacDonald
Binnig et al., "The Scanning Tunneling Microscope", Sci. Am. 253:50 (1985).
Binnig et al., "Atomic Force Microscope", Physical Review Letters, 36:9 (3 Mar. 1986).

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