Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1996-04-05
1999-06-15
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324758, G01R 3102
Patent
active
059125551
ABSTRACT:
A probe apparatus comprising an apparatus body fitted with a probing card having a probe connected electrically with an electrode of an object of inspection, a test head operatively mounted on the apparatus body and electrically continuous with the probe of the probing card, rotating mechanism for rotating the test head, and vertical moving mechanism for vertically raising or lowering the test head.
REFERENCES:
patent: 3437929 (1969-04-01), Glenn
patent: 4527942 (1985-07-01), Smith
patent: 5440943 (1995-08-01), Holt et al.
Akaike Yutaka
Kono Isao
Mochizuki Chiaki
Yoshioka Haruhiko
Karlsen Ernest F.
Tokyo Electron Limited
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