Prism array for electron beam inspection and defect review

Details Prism array for electron beam inspection and defect review Prism array for electron beam inspection and defect review

2005-04-12

2005-04-12

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

06878937

ABSTRACT:
One embodiment disclosed relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes illumination optics, objective optics, projection optics, and a beam separator. The beam separator is configured to receive the incident beam from the illumination optics and bend the incident beam towards the objective optics, and also to receive the scattered beam from the objective optics and bend the scattered beam towards the projection optics. The beam separator comprises a magnetic prism array including a central magnetic sector, inner magnetic sectors outside the central sector, and outer magnetic sectors outside the inner sectors. Each of the inner and outer sectors may be configured to have its field strength independently adjustable for alignment and focusing purposes.

REFERENCES:
patent: 5319207 (1994-06-01), Rose et al.
patent: 6586733 (2003-07-01), Veneklasen et al.
patent: 6803571 (2004-10-01), Mankos et al.
patent: 6803572 (2004-10-01), Veneklasen et al.
R.M. Tromp “Low-energy electron microscopy”, IBM J. Res. Develop., Jul. 2000, pp. 503-516, vol. 44, No. 4.
V. Kolarik, et al. “Close packed prism arrays for electorn microscopy”, Optik 87, No. 1 (1991), pp. 1-12.
H. Rose, et al. “Outline of a versatile corrected LEEM”, Optik 92, No. 1 (1992), pp. 31-44.

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