Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-06-28
2005-06-28
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S095000, C700S117000, C438S005000
Reexamination Certificate
active
06912436
ABSTRACT:
A method and an apparatus for selectively applying correction to a process control. Manufacturing data relating to the processing of a workpiece is acquired. The manufacturing data includes metrology data relating to the processed workpiece. An adjustment for at least a first or a second control input parameter is determined based upon the manufacturing data. The first and second control input parameters are organized to isolate the first control input parameter from the second control input parameter for adjusting at least one of the first and the second control input parameters, using a controller.
REFERENCES:
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 5526293 (1996-06-01), Mozumder et al.
patent: 5969972 (1999-10-01), Kerszykowski et al.
patent: 6276989 (2001-08-01), Campbell et al.
patent: 6304999 (2001-10-01), Toprac et al.
patent: 6460002 (2002-10-01), Bone et al.
Hermann et al., “Understanding the Impact of Equipment and Process Changes with a Hetrogeneous Semiconductor Manufacturing Simulation Environment” Proceedings of the 2000 Winter Simulation Conference, pp. 1491-1498.
Bode Christopher A.
Edwards Richard D.
Jones Gary
Purdy Matthew A.
Advanced Micro Devices , Inc.
Gandhi Jayprakash N.
Williams Morgan & Amerson P.C.
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