Printhead fabrication method

Details Printhead fabrication method Printhead fabrication method

2007-03-13

2007-03-13

Norton, Nadine (Department: 1765)

Etching a substrate: processes

Forming or treating thermal ink jet article

C216S074000, C216S077000, C216S079000, C347S054000

Reexamination Certificate

active

11165062

ABSTRACT:
A method of fabricating a plurality of nozzle arrangements for an inkjet printhead chip includes fabricating drive circuitry layers on a substrate with a CMOS fabrication process; depositing a first sacrificial layer on the substrate; depositing a heater layer for forming one or more heating circuits on the first sacrificial layer and etching the heater layer to form the heating circuits; depositing a resiliently flexible layer of dielectric material on the substrate to cover the heater layer and etching the dielectric layer to form one or more actuators and one or more ink ejection members; depositing a second sacrificial layer on the substrate to cover the actuators and the ink ejection members and etching the sacrificial layer to define deposition zones for one or more nozzle chamber walls and one or more roof walls; depositing a layer of a structural material on the second sacrificial layer to form the nozzle chamber walls and the roof walls; and etching away the sacrificial layers.

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