Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2005-11-15
2005-11-15
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S486000
Reexamination Certificate
active
06964279
ABSTRACT:
A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by:in-line-formulae description="In-line Formulae" end="lead"?Qc=KP2m(P1−P2)nin-line-formulae description="In-line Formulae" end="tail"?so that the flow rate can be controlled to the target flow rate with high precision and speed.Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P2/P1=r, obtained from an upstream pressure P1and a downstream pressure P2is constantly compared with a critical value r, and under critical conditions (r≦rc), the flow rate is calculated by:in-line-formulae description="In-line Formulae" end="lead"?Qc=KP1.in-line-formulae description="In-line Formulae" end="tail"?Under non-critical conditions (r>rc), the flow rate is calculated by Qc=KP2m(P1−P2)n.
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International Search Report, PCT/JP02/12250, 6 pages (includes first 2 pages of WO 03/058363 A1).
Dohi Ryousuke
Ikeda Nobukazu
Inui Shujiro
Matsumoto Atsushi
Nakamura Osamu
Fujikin Incorporated
Griffin & Szipl, P.C.
Krishnamurthy Ramesh
Ohmi Tadahiro
Tokyo Electron Ltd.
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