Pressure type flow rate control apparatus

Details Pressure type flow rate control apparatus Pressure type flow rate control apparatus

1997-03-05

1998-08-11

Ferensic, Denise L.

Fluid handling

Convertible

Reversible check

1374875, 137613, 137468, E03B 1100

Patent

active

057913692

ABSTRACT:
A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

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patent: 5148829 (1992-09-01), Deville
patent: 5190068 (1993-03-01), Philbin
patent: 5460196 (1995-10-01), Yonnet

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