Pressure sensor system with semiconductor chip and antenna...

Details Pressure sensor system with semiconductor chip and antenna... Pressure sensor system with semiconductor chip and antenna...

2007-08-07

2007-08-07

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

11239018

ABSTRACT:
In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.

REFERENCES:
patent: 4067235 (1978-01-01), Markland et al.
patent: 4857893 (1989-08-01), Carroll
patent: 6885291 (2005-04-01), Pollack et al.
patent: 2001-187611 (2001-07-01), None

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